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  • Plasma-Therm, Inc. Designs, manufactures, supports and sells thin film etching and plasma deposition systems for the Photomask, Data Storage, Optoelectronics, Telecommunication and MicroElectroMechanical System [MEMS] Industries.  

  • Tegal Corporation designs and builds two families of advanced plasma etch tools for a wide range of process applications. The 6500 Series systems are utilized in the most demanding semiconductor fabrication processes, often referred to as "critical" etch technology. The 6500 Series system is designed to etch feature sizes 0.18 µm and to etch the new materials being used to fabricate today's most advanced semiconductor devices.  

  • Semitool has it! The revolutionary, fully automated platform for high throughput production of copper interconnects has arrived. Utilizing Semitool's advanced electrochemical deposition (ECDTM) technology, the LT-210TM system delivers a total chemical solution that:  


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