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Semiconductor Technologies :University Microelectronics Research Labs
     

  • UCLA Welcome to the Nanoelectronics Research Facility (NRF)!  

  • Stanford What is SNF? The National Science Foundation (NSF) has created a network of universities referred to as the National Nanofabrication Users Network (NNUN).  

  • UC Berkeley The U.C. Berkeley Microfabrication Laboratory, the Microlab (layout 222K), is a class 100 cleanroom laboratory located on the fourth floor of Cory Hall.  

  • Penn State , Electrical Engineering Research Center...  

  • Plasma Physics Research - Our group, under the direction of Professor David Graves, focuses on the fundamentals and applications of weakly to partially ionized gases, or plasmas, to technological problems, primarily in the microelectronics industry. A current major environmental concern in semiconductor manufacturing involves the use and emission of PFCs (perfluorinated compounds) and HFCs (hydrofluorinated compounds) during plasma etching of silicon dioxide and plasma-assisted chamber cleaning processes in dielectric film CVD systems.  


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